| |
|
Bytes |
 |
Temperature Diagnostics For A Dual-Arc FRTP™ Tool |
443,591 |
|
Engineering Ultra-Shallow Junctions Using FRTP™ |
235,072 |
|
Characterizing Implant Behavior During Flash Rtp by means of Backside Diagnostics |
1,454,961 |
|
Advanced Annealing for Sub-130nm Junction Formation |
1,516,822 |
|
Annealing of Ultra-Shallow Implanted Junctions using Arc-Lamp technology:
Achieving the 90 nm Node |
121,409 |
|
Temperature Uniformity During Impulse™ Anneal |
91,574 |
|
Spike Annealing of Implanted PMOS Gates |
130,990 |
|
Spike Thermal Processing Using Arc Lamps |
182,961 |
|
Annealing Ultra Low Energy Boron Implants with an Arc Lamp System |
347,852 |
|
Electronic Measurements of Annealed Boron Implants for Shallow Junctions |
300,439 |
|
Emmissivity Independent Process Control in a Short Wavelength Arc Lamp
RTP Chamber |
499,138 |
|
2D Real-Time Temperature Measurements |
52,085 |
|
High Power Arc Lamp RTP System for High Temperature Annealing Applications |
65,893 |
Downloadable research papers are provided in Portable Document Format (PDF) and may be viewed with Adobe Acrobat Reader.
