Advanced Semiconductor RTP is the commercial focus of Vortek today. The company is launching a family of RTP tools, led by Flash Assist RTP (fRTP). fRTP is targeted at ultra-shallow junction formation for the 90nm node and below.
fRTP will be complemented by Vortek’s Impulse Anneal RTP (iRTP), a simplified system that will lead the industry for other thermal processes.
This section provides an overview of RTP technology, and Vortek’s proprietary fRTP and iRTP techniques.