Vortek - Advanced Semiconductor RTP

The Vortek Water-Wall arc lamp is the world's most powerful source of continuous white light, and was listed for many years in the Guiness Book of Records.

When coupled to precision optical reflectors, Vortek Lamps produce an intense beam of radiant energy that forms the heart of Vortek’s semiconductor RTP systems. Over the years, they have also been used for solar simulation, thermal testing and other specialized applications.

Single lamps are available with electrical input powers exceeding 500 kilowatts (kW) and radiated optical powers of 250kW+.

Intense light is generated in a high-pressure argon arc enclosed in a clear quartz envelope. An unfiltered Vortek Lamp radiates in a spectrum covering the range of 0.2 to 1.4 microns. The arc produces radiation at visible wavelengths with additional power in the infrared and ultraviolet regions of the spectrum.

WATER WALL ARC SCHEMATIC

Click on the schematic for a closer view

The high powers available from these lamps are achieved using Vortek's patented method of internally cooling the arc envelope. A spiraling film of deionized water flows between the plasma arc and the clear quartz lamp tube. This rapidly swirling water coats the inner surface of the tube, efficiently cooling it and insuring reliable operation.

A TYPICAL STAND ALONE (NON-RTP) VORTEK WATER-WALL ARC SYSTEM CONSISTS OF THE FOLLOWING KEY COMPONENTS:

	LAMPHEAD ASSEMBLY The Lamphead produces continuous optical radiation in an electric arc operating in high pressure argon gas. The arc is vortex stabilized within a single quartz tube. Rapidly swirling water on the inner surface of this tube efficiently removes excess heat and prevents deposition of electrode material. This patented internal cooling method guarantees reliable operation at high powers.

	OPTICAL REFLECTOR For most customers, the lamphead is built into an optical reflector. In RTP tools, this captures the light from the arc lamp and beams it onto the wafer plane. Other applications have included 3m x 4m solar simulators and high temperature line sources.

	SERVICE CABINET The Service Cabinet contains the subsystems required to operate and cool the Lamphead. This includes the argon gas reservoir, deionized water for primary cooling, electrical power systems, pumps, filters and computer control unit, operated from a touch screen panel.

	UMBILICAL The lamphead is typically connected to the service cabinet with an umbilical supplying all gas, water, electrical power, and control connections required by the lamphead. The standard umbilical length is 5m (16ft). FACILITY SUPPORT Infrastructure to support the lamp system includes and external water cooling loop, and system specific transformer.